Sensor Development and Integration

Micro-mechanical sensors are gaining increasing importance in application areas e.g. automotive, entertainment, industry especially due to their small form factor, light weight and lower production costs. Fraunhofer IZM offers a complete development – from requirements, concept, manufacturing of sensor elements to packaging and test – of sensors for the measurement of physical parameters e.g. pressure, acceleration, force, gas concentration. For the realization of micro-mechanical sensors, different physical semiconductor effects can be used of to achieve a sufficiently high sensitivity and satisfying linearity.

Pressure Sensors

• Miniaturized pressure sensors (measuring range 1-400 bar, operating temperature up to 125°C)
• High pressure sensors (measuring range up to 1000 bar, operating temperature up to 125°C)
• High temperature sensors (measuring range 1-750 bar, operating temperature up to 350°C)
• Low pressure sensors (measuring range < 100 mbar, sensitivity area µV/VkPa, operating temperature up to 125°C)

Acceleration Sensors

• High-G acceleration sensors up to 60.000 g
• Precision accelerations detection for motion recognition with high sensitivity and good linearity performance

Gas Sensors

• Detection of VOC gases with SiC-based heating platforms
• Detection of CH₄, H₂, NO₂, CO and C0₂ with metal oxide sensor layers

• Sensor design
• Reliability and lifetime optimization
• Standard and customer-specific packaging with integrated sensor data processing e.g. TO8,  packages with  media separation, molding
• Characterization of pressure (10 m-100 Bar), gas and acceleration sensors (up to 40 g)