Equipment Substrate development

The substrate line at IZM enables the production of flexible substrates in sheet sizes up to 60 x 40 cm2. In addition to polyimide as a typical substrate material, thermoplastic materials (TPU, PC, LCP) are increasingly being used, as well as materials that are particularly suitable for medical applications (e.g. Parylene, LCP). Subtractive and semi-additive patterning processes are used for copper conductive traces, allowing for 10 µm lines/space to be achieved.