Micro-mechanical sensors are gaining increasing importance in application areas e.g. automotive, entertainment, industry especially due to their small form factor, light weight and lower production costs. Fraunhofer IZM offers a complete development – from requirements, concept, manufacturing of sensor elements to packaging and test – of sensors for the measurement of physical parameters e.g. pressure, acceleration, force, gas concentration. For the realization of micro-mechanical sensors, different physical semiconductor effects can be used of to achieve a sufficiently high sensitivity and satisfying linearity.