Wafer Level System Integration

The department "Wafer Level System Integration" (WLSI) develops advanced packaging and system integration technologies and offers customer-specific solutions for microelectronic products in the overall scope of smart system integration. Approx. 60 scientists work at two locations: Berlin and Dresden  (ASSID: All Silicon System Integration Dresden). WLSI is cooperating globally with manufacturers and users of microelectronic products as well as cleanroom equipment producers and material developers from the chemical industry.

2.5/3D Technologies

  • TSV Integration
  • Silicon interposer TSV first
    • TSV via middle
    • TSV via last
    • Device stack

High Density Redistribution




  • Back grinding tape lamination
  • Wafer backgrinding
  • Polishing
  • mechanical blade dicing
  • laser grooving
  • laser stealth dicing
  • wafer edge trimming

High-Density Assembly

Failure Analysis & Reliability Investigation

Sensor Development

  • Sensor design
  • Reliability and lifetime optimization
  • Standard and customer-specific packaging with integrated sensor data processing e.g. TO8,  packages with  media separation, molding
  • Characterization of pressure (10 m-100 Bar), gas and acceleration sensors (up to 40 g)
  • Planar technologies (SiO, SIN deposition, Sputtering)
  • Overview sensor activities

Photonic & Plasmonic Systems

Electro-Optical Workbench | PhoxLab | Fraunhofer IZM | Volker Mai
© Fraunhofer IZM | Volker Mai
Electro-Optical Workbench

The department WLSI has cleanrooms and laboratories with production-compatible equipment available at both sites. Beside the flexibility regarding the processing of different wafers sizes, both process lines are also  characterized by a high adaptability of the individual processes. The process line at ASSID is particularly tailored to realize production-related and industry-compatible development and processing.

Furthermore, in Berlin we have with our PhoxLab an independent and neutral platform for benchmarking and presentation of photonic components and solutions for various hirachy levels, architectures and protocols in data centers.  

Overview Equipment




Photonic Kit for Network Architecture at Speeds above 50 Tbit/s

Fraunhofer IZM, and especially the experts from the department »Wafer Level System Integration« are involved in this important EU funded joint project (2022-2026).


CMOS & Heterointegration in Dresden

Fraunhofer IZM-ASSID and Fraunhofer IPMS bundle their competencies in the new »Center for Advanced CMOS & Heterointegration Saxony« with state-of-the-art equipment.




virtual SHOWROOM

Visit the new virtual showroom of the Fraunhofer research network  "Functional Integration in Micro and Nanoelectronics"  and learn more about the competencies and know-how of Fraunhofer IZM-ASSID.


Upcoming Events

Meet Fraunhofer IZM and its department WLSI at the following events:

Sensor + Test
May 9th-11th, Nuremberg
visit us in hall 1,  booth 317/4


May 9th-11th, Nuremberg,
visit uns in hall 5, booth 447

ECTC 2023
May 30 - June 2, 2023, Orlando, USA
visit our  booth and technical presentations: June 2,  session 31 & 33



WLSI completely ISO 9001:2015 certified!

Since May 2018, the department WLSI is holding the ISO 9001:2015 certificate for both its sites - in Berlin and Dresden.

The department has thus completed the process of adjusting it's complete management processes to fulfill the strict requirements of the cerfification after the WLSI part ASSID set a good example in 2015 when it first received the ISO 9001 certificate for its site in Dresden.

Online Seminars

Technical Video Presentations

watch presentations of our WLSI experts:


Charles-Alix Manier, published Dec 2022

Precise passive alignment as a viable option for photonic applications (Youtube)


More Information

Overview Contact Persons

Quickly find the right expert for your question & request.


WLSI is involved in a lot of national and international projects. An excerpt of these will show you our expertise and achievements.



WLSI is regularly presenting latest research results at conferences and exhibitions. Have a closer look at some Exhibits.

Brochures and Presentations

Find brochures for your general or specific information.

ISO 9001

Since 05/2015 the department part “ASSID” in Moritzburg is working with a ISO 9001 certified management system to guarantee high quality standards.

Furthermore, in May 2018, the WLSI department part in Berlin has also received the ISO 9001:2015 certificate.


Imagefilm IZM-ASSID

Image video IZM-ASSID