Researchers at Fraunhofer IZM and the University of Münster have developed a wafer-based manufacturing process for a novel silicon diode that can measure particles depending on their angle of incidence. The energy-filter diode is intended to help distinguish signal electrons from background electrons that strike a detector with nearly the same energy but at different angles. One potential application is the international KATRIN experiment, which aims to determine the neutrino mass. In the cleanroom at Fraunhofer IZM, deep honeycomb-shaped microstructures were introduced into large-area detector wafers, electrically passivated, and transferred to the University of Münster for further investigation.
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